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In order to cater to the Electronics industry,
EOX has a Nitrogen Generator Plant located in Sama Jaya Free Industrial Zone.
To keep up with the large demand in this sector,
EOX has invested in underground pipelines
to supply the gas directly to these customers.
With these pipelines, problems
associated with delivery are eliminated.
Beside Nitrogen, EOX also supply
electronic industry with specialty gases and other purified / certified
gases.
We offer a full line of mixtures to
fit any analytical
requirement, from unanalyzed mixtures for non-critical applications, to
high
accuracy analytical mixtures certified to NIST standards.
Type of gasses used in this
industry includes:
NITROGEN
A growing application for nitrogen
is the inerting of
printed circuit board reflow and wave soldering ovens, to prevent
oxidation and
facilitate the use of weaker fluxes that decompose more easily without
leaving
a residue.
The semiconductor industry uses
ultra high purity nitrogen
to inert a number of elevated temperature reactor operations associated
with
the processing of silicon wafers to microcircuits. Most of the volume
however
is used for the general inerting of wafers moving on tracks, idling in
reactors
and ramping up and down in temperature. Many active gases are mixed
with
nitrogen to achieve the deposition or removal of material on the
surface of
silicon wafers. Some of the addition gases are silane (SiH4), arsine (AsH3), phosphine (PH3), boron trichloride
(BCI3) and many
others.
ARGON
In the semiconductor industry argon
is used in a number of
device fabrication steps but its largest volume is as a protective
atmosphere in the manufacture of single crystal silicon by a number of
processes known as crystal pulling. In the Czochralski or CZ process,
which
accounts for about 85% of all wafers produced, a seed crystal is
immersed in
amolten ultra-high purity silicon and a cylindrical bar of single
crystal
silicon is gradually pulled from the melt. The single crystal is sliced
into
thin wafers for subsequent processing into semiconductor chips. Single
crystals
provide the uniform orientation of molecules essential in the use of
silicon as
a semiconductor.
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